Tohoku University Technology: High Mobility ZnO Thin Film on Transparent Film Using Electron Beams
Flexible transparent electrodes can be made inexpensively with ZnO (zinc oxide)!
■Introduction of Tohoku University Technology (T19-673) Further evolution of wearable devices is expected through the performance improvement of transparent electrodes, which are semiconductor materials. ZnO is a representative conductive oxide, and its application to transparent electrodes is desired. Although thin film fabrication methods such as chemical vapor deposition (CVD), atomic layer deposition (ALD), and sputtering have been established, there has been a challenge in forming them on flexible substrates like resin without compromising conductivity. This invention enables the production of ZnO thin films with excellent conductivity and an unprecedented stable structure on PET by irradiating ZnO particles with electron beams.
- Company：Tohoku Techno Arch Co., Ltd.
- Price：Other
